To Safely & Securily send in your Vat / Tokyo Electron unit for service please use the "Pack & Ship Guarantee" for UPS® or USPS®.
Find Your Local UPS Store®
Please include your contact information and a brief description of the problem with the Vat / Tokyo Electron unit.
Please include the $250 minimum repair/recycle charge with unit.

Shipping Address less than 75lbs Industrial Electronic Repair/Recycling 145 Rockwell Place Ct Tobaccoville, NC 27050 Call 1 (336) 969-0110

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Recent Vat / Tokyo Electron Units.

VAT 641PM-36PM   Vat / Tokyo Electron APC   VAT Vacuumvalves AG 64244-PE52   VAT 102611-r1 641pm   Vatech ME4D37AAA MX ECO  Vatech ELVOvert  VAT Vacuumvalves AG 641PM-16BC Pressure  VAT Vacuumvalves AG 640CV-99LA Cable, 5 m  Vatech Frequency  Vatech pDRIVE MX  VAT CONTROLLER   Vatech Drive Mx  Vat / Tokyo Electron APC BOARD   

3  A  B  C  D  E  I  F  G  H  J  K  L  M  N  O  P  Q  R  S  T  U  V  W  X  Y  Z  2  6  (  4  5  9  8  1  "  #  

FAQ

Frequently asked qaestions

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How much does it cost?

$250 minimum estimate/repair/recycle charge on most units. Heavy freight units repair/recycle charge usually runs 10x shipping cost. Payments required upon arrival of units to IER.

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Warranty on repairs?

30-365 days depending on complexity of repairs & nature of unit.

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How to Ship Unit?

The Pack & Ship Guarantee includes coverage for UPS® and USPS®. Find Your Local Store

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Industrial Electronic Recycling

145 Rockwell Place Ct Tobaccoville, NC 27050

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1 336 969-0110
145 Rockwell Place Ct Tobaccoville, NC 27050

Open Hours
WEEKDAYS 9AM-5PM, SAT: CLOSED

Request Service

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